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| 断层面计测系统 |
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| 产品简介：The layer profiling system performs layer structural by generating tomographic images of specified cutting location from potical microscope images that are obtained by moving sequentially in the vertical direction.
Features
Super depty measurement
A Ryoka Linnik interference objective lens equipped with an optical path compensation plate insertion mechanism allows measurement of the layer section under a transparent layer to a maximum depth 3 mm. This system is very useful for defect analysis after manufacturing of flat display panels such as plasma displays.
Vevy weak interference fringe patterns can be capured
Since our original VSI interference image creation software enables image creation from very weak interference fringe patterns that cannot be visually recognizied, foreign particle locations in multilayer film can be identified.
100 magnification interference is achieved
A Ryoka Linnik interference objective lens allows easy adjustment and observation for 100 magnification interference figures for which alignment and adjustment have been difficult.
NSIMAGIK compatible system
NSIMAGIK specifications common to various image creation systems and image processing system are fully supported. The required NSIMAGIK software can be freely selected, and future expansion of functions is possible.
Specifications of stage
Item RSY-150 RSY-300
Compressed Air ≧0.5Mpa
Tube: Internal diameter 4mm, External diameter 6mm
Power Saurce Single-phase 100V 4KVA
Clean Room Response Response to Class 1000
Stage Unit Size 600(W)×500(D)×1400(H) 1200(W)×800(D)×1500(H)
Stage Unit Weight About 200kg About 300kg
Control Rack Unit Size 570(W)×750(D)×1850(H) 5700(W)×750(D)×1850(H)
Control Rack Unit Weight About 180kg
X-Y Stage
X Valid Stroke ±75mm ±150mm
Y Valid Stroke ±75mm ±150mm
Maximum Speed 10mm/sec
Actuator Ball screw, Open-loop control
Stage Resolution 1μm/step
Repeatability ±1μm
Z axis
Valid Stroke ±50mm
Actuator Grand screw, Open-loop control
Z Axis Resolution ±1μm/step (Half-step)
Jog-Dial 100μm/Revolution
Joy-Stick Hi-speed setting: 80000pps, Low-speed setting: 200pps
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| 产品说明：The layer profiling system performs layer structural by generating tomographic images of specified cutting location from potical microscope images that are obtained by moving sequentially in the vertical direction.
Features
Super depty measurement
A Ryoka Linnik interference objective lens equipped with an optical path compensation plate insertion mechanism allows measurement of the layer section under a transparent layer to a maximum depth 3 mm. This system is very useful for defect analysis after manufacturing of flat display panels such as plasma displays.
Vevy weak interference fringe patterns can be capured
Since our original VSI interference image creation software enables image creation from very weak interference fringe patterns that cannot be visually recognizied, foreign particle locations in multilayer film can be identified.
100 magnification interference is achieved
A Ryoka Linnik interference objective lens allows easy adjustment and observation for 100 magnification interference figures for which alignment and adjustment have been difficult.
NSIMAGIK compatible system
NSIMAGIK specifications common to various image creation systems and image processing system are fully supported. The required NSIMAGIK software can be freely selected, and future expansion of functions is possible.
Specifications of stage
Item RSY-150 RSY-300
Compressed Air ≧0.5Mpa
Tube: Internal diameter 4mm, External diameter 6mm
Power Saurce Single-phase 100V 4KVA
Clean Room Response Response to Class 1000
Stage Unit Size 600(W)×500(D)×1400(H) 1200(W)×800(D)×1500(H)
Stage Unit Weight About 200kg About 300kg
Control Rack Unit Size 570(W)×750(D)×1850(H) 5700(W)×750(D)×1850(H)
Control Rack Unit Weight About 180kg
X-Y Stage
X Valid Stroke ±75mm ±150mm
Y Valid Stroke ±75mm ±150mm
Maximum Speed 10mm/sec
Actuator Ball screw, Open-loop control
Stage Resolution 1μm/step
Repeatability ±1μm
Z axis
Valid Stroke ±50mm
Actuator Grand screw, Open-loop control
Z Axis Resolution ±1μm/step (Half-step)
Jog-Dial 100μm/Revolution
Joy-Stick Hi-speed setting: 80000pps, Low-speed setting: 200pps
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